Experimental Research on Micro-Electroplating Process to Adjust Mass Balance of Micro-Quartz Gyroscope

To eliminate the mechanical coupling error of micro-quartz tuning fork gyroscope, this work uses mass adjustment technique by electroplating gold mass on the tuning fork. With the orthogonal test, the effects of temperature, current and mixing speed on the surface roughness of mass are observed and the height of gold mass versus time is analyzed. Therefore the parameters of fabrication could be determined as follows. The temperature should be controlled at 70 ℃, the electric current be set to 5 mA, mixing speed be set to 900 r/min and the electroplating time is 130 min. It is shown that, after preliminary laser trimming, the mechanical coupling error of gyroscope is decreased from 1.840 V to 0.132 V, and the performance of micro quartz gyroscope is improved.