TSAI Hai-lung, YAN Xue-liang, WANG Su-mei, XIA Bo, LIU Peng-jun, JIANG Lan. Advances in Femtosecond Laser Fabrication of MicrochannelsJ. Transactions of Beijing institute of Technology, 2012, (10): 991-1003.
Citation:
TSAI Hai-lung, YAN Xue-liang, WANG Su-mei, XIA Bo, LIU Peng-jun, JIANG Lan. Advances in Femtosecond Laser Fabrication of MicrochannelsJ. Transactions of Beijing institute of Technology, 2012, (10): 991-1003.
TSAI Hai-lung, YAN Xue-liang, WANG Su-mei, XIA Bo, LIU Peng-jun, JIANG Lan. Advances in Femtosecond Laser Fabrication of MicrochannelsJ. Transactions of Beijing institute of Technology, 2012, (10): 991-1003.
Citation:
TSAI Hai-lung, YAN Xue-liang, WANG Su-mei, XIA Bo, LIU Peng-jun, JIANG Lan. Advances in Femtosecond Laser Fabrication of MicrochannelsJ. Transactions of Beijing institute of Technology, 2012, (10): 991-1003.
Advances in Femtosecond Laser Fabrication of Microchannels
Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.
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