Synthetic Process of BaAl₂S₄:Eu Sputtering Target

Europium-doped barium thioaluminate (BaAl₂S₄:Eu) sputtering targets were synthesized by the process of spark plasma sintering (SPS) and powder sintering, respectively. The components and structures of the targets were analyzed. The luminescence properties of the films deposited by the targets were also observed. It is found that the component parts contained in BaAl₂S₄:Eu target synthesized by SPS have high purity and density with less hole, and no oxides or other sulfides are observed. Photoluminescence (PL) spectrum of the film shows there is a blue emission main peak at 470nm. While the compounds contained in BaAl₂S₄:Eu target synthesized by powder sintering have low purity and density with more holes like three-dimensional network structure, and the target is easy to be oxidized. PL spectrum of the deposited film shows the blue emission peak at 470nm is relatively weak. In contrast, the spark plasma sintering method is more suitable for preparing BaAl2S4:Eu sputtering target.