Accuracy Analysis of 12-DOF Macro-Micro Micro-Assembly System

To improve the motion control accuracy of separate-structured 12-DOF macro-micro micro-assembly system, an error model is established by using error vectors combining method. Pose error calculation equations of micro parts are established. An error sensitivity analysis method is proposed. Error compensation vectors of micro assembly system are obtained using micro pose measuring device. As a result, motion control accuracy of the assembly system can be improved to a degree of micrometer level.