Mathematical Modeling of Micro Thermal Shear Stress Sensor

In order to improve the sensitivity of MEMS micro thermal shear stress sensor, the thermal effect of sensor is analyzed and the relevant mathematical physics model is established in this paper. Based on the model, the influences of hot film, insulation layer and cavity geometry on sensors sensitivity are studied in theory. Comparing the theoretic analysis with the results based on numerical simulation by using the Fluent, the results show that the mathematical model is reasonable.