Plasma in Slit-Shaped Microhollow Cathode Sustained Discharge

In order to obtain stable, large-volume plasmas at high pressures, the characteristics of slit-shaped microhollow cathode discharge (SMHCD) in argon is investigated experimentally. A three-electrode system based on SMHCD is given. The SMHCD acts as the pre-ionization source or plasma cathode. The discharge characteristics of this system are investigated under different conditions. The discharge modes during the process of discharge are also discussed. The results showed that the SMHCD have similar characteristics as the traditional microhollow cathode discharges. The stable glow discharge can be obtained under certain conditions. SMHCD sustained discharge (SMSD) supplies a possible way to generate large-volume, high-pressure plasmas. The SMSD have similar characteristics as the traditional DC glow. The current of the SMHCD and the voltage applied on the third electrode play an important role in the generation of plasma in the outer space of the SMHCD. The system can generate large volume, uniform plasmas.