A Study on the Driving and Detecting-Electrodes in a Micro Quartz Tuning Fork Gyroscope

The paper investigates the properties of driving and detecting electrodes in a micro quartz tuning fork gyroscope. Based on theories in elastic mechanics and electrostatics, the Possion equation that describes the distribution of electric field in the piezoelectric beam is derived, and then solved, while the expression for electric field distribution concerning several typical electrode configurations is achieved. The equivalent volume force for the driving electrode and the piezoelectric current for the detecting electrode are then calculated. The optimum driving and detecting electrode configurations are chosen based on the values of the equivalent volume force and piezoelectric current. Method for the study of properties of electrodes in micro quartz tuning fork gyroscopes is proposed.