Flexure Vibration Equation of Piezoelectric Beam and Calculation of Equivalent Volume Force

Aim To provide the design parameter for the development of quartz angular rate sensor. Methods Based on piezoelectric theory and elastic mechanics theory, intrinsic differences between two vibrations in the x direction and the z direction were discussed for quartz crystal vibration beam, and the differential equation of the flexural vibration of piezoelectric beam was derived. Numerical calculations were performed for several typical electrode configurations. Results and Conclusion The concept of equivalent volume force was presented, and a general formula is given for it. Optimum electrode configurations were chosen, and the side ratio of the piezoelectric beam was also determined.