L-B单分子膜制备的MIS结构和电容电压特性

Structure and C-U Characteristics of MIS Device Made with L-B Films

  • 摘要: 利用L-B单分子功能膜的绝缘性制作MIS器件.通过对它的结构和电容-电压(C-U)特性曲线的研究,发现L-B膜可以改善MOS器件的性能和消除MOS器件的“异常”C-U特性现象,利用C-U特性曲线可以检测L-B膜成膜质量,利用零偏压时的电容值可以计算各成膜材料的介电常数.

     

    Abstract: MIS device have been made making use of the insulating characteristics ofthe L-B film Studying the MIS structure and capancitance-voltage (C-U) curve, it is found that L-B film can improve the function and eliminate the abnormal phenomena of the C-U characteristic curve of the MOS device. Being a probe, the C-U characteristic Curve of the L-B film can be ed as a tool tO verify the quality of the L-B film deposition.Making use of the Value of the capacitance atzerobias, the dielectric constant of L-Bfilm materials can be calculated.

     

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