Abstract: In order to solve the problem that the traditional electromechanical fuze cannot complete the insurance release under the weak environmental forces and the traditional MEMS solid state switch cannot achieve the low-voltage driving capacity (5~35 V). A MEMS solid-state fuze was proposed based on silicon-based MEMS processing technology and corona discharge effect. A micrometer-scale design idea was used to achieve energy and information communication between the solid-state fuze and the fuze control system. First, establishing a mathematical model of Corona discharge and using finite element analysis methods such as COMSOL, the solid-state insurance control layer based on low-voltage driving was completed, and the average driving voltage (33.1 V) of the control layer was achieved in laboratory static testing. Second, the capacitor discharge mode was combined with electrical and Joule thermal simulations, using the capacitor energy storage index (10 V, 10 μF). Finally, the structural design of the execution layer under different current intensity environments was completed. Based on the MEMS processing technology, the production of solid-state safety fuze was finally achieved.